Run-to-run control in semiconductor manufacturing
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Thể loại:
Năm:
2001
In lần thứ:
1
Nhà xuát bản:
CRC Press
Ngôn ngữ:
english
Trang:
333
ISBN 10:
0849311780
ISBN 13:
9780849311789
File:
PDF, 9.13 MB
IPFS:
,
english, 2001
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